| 摘要 |
PROBLEM TO BE SOLVED: To provide a vacuum carrier without the need of a transfer chamber installed between a process chamber and a load locking chamber. SOLUTION: A linear vacuum carrier is installed in the load locking chamber, hands 12 and 13 for mounting a workpiece of the linear vacuum carrier are constituted of planar hand bases 12b and 13b and holding members 12c and 13c erected on both sides of the hand bases, and a space S between both holding members between the workpiece W and the hand bases 12b and 13b is opened to a rear direction. When transferring the workpiece W between the vacuum carrier and an atmospheric robot, the chuck of the atmospheric robot enters the space S without interfering with the vacuum carrier, and the workpiece is surely transferred. COPYRIGHT: (C)2003,JPO |
