| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an SMIF system for manufacturing a semiconductor under a clean environment, especially the SMIF system having a sealing mechanism not causing frictions so as to prevent the generation of fine particles during work. <P>SOLUTION: A substrate housing container 50 having a door member 60 not causing the frictions for carrying a workpiece is provided with a container body 51, the door member 60, an electromagnet, and a connector 63. In this case, the container body 51 has an inner space for housing the workpiece, and has an opening on one end face having a permanent magnet. The door member 60 has a magnetic material corresponding to the permanent magnet provided on the opening and an airtight space is formed when the door member 60 is closed. The electromagnet is arranged at the door member 60 while being associated with the permanent magnet provided on the opening. The connector 63 is connected to an external power source capable of controllably operating the electromagnet and opening the door member 60. <P>COPYRIGHT: (C)2003,JPO</p> |
