| 摘要 |
PROBLEM TO BE SOLVED: To provide a hard carbon film which can prevent the sticking of moisture and lubricants in spite of the improvement of its hardness. SOLUTION: On formation of the tetrahedral amorphous carbon film, an FCA (Filtered Cathodic Arc) method is used. An object 45 is irradiated with an ion beam 55 of carbon. In the process of the deposition of carbon atoms, gaseous CF<SB>4</SB>is filled in chamber. Fluorine atoms are taken into the tetrahedral amorphous carbon film deposited on the object 45. Even if a dense structure is formed, sufficient fluorine can be taken into the tetrahedral amorphous carbon film. Fluorine scattered on the surface of the tetrahedral amorphous carbon film secures sufficient water repellency. COPYRIGHT: (C)2003,JPO |
