| 摘要 |
PROBLEM TO BE SOLVED: To obtain a correct control signal by removing a contaminant adhering to the surface of a window plate constituting an entrance window and by correcting an output by a prescribed means even when the contaminant adheres. SOLUTION: An infrared noncontact temperature sensor 10 is provided so as to be equipped with a cleaning device 6 used to remove the contaminant on the surface of the window plate 1 constituting the entrance window 3 on which infrared rays L are incident. COPYRIGHT: (C)2003,JPO |
