| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a measuring method for energy use amount and a diagnosis method for energy saving which is capable of surely grasping use of energy amount by everybody for any equipment and easily judging energy saving method. <P>SOLUTION: By continuously measuring energy use amount for every equipment element having fabrication process and comparing the production amount in the fabrication process, an ideal energy use amount is confirmed for every equipment element. By comparing energy use amount of the measured equipment element, an energy capable of being saved is found. <P>COPYRIGHT: (C)2003,JPO |
