摘要 |
PROBLEM TO BE SOLVED: To secure a vapor track in a low angle heater and to develop a rotational recovery mechanism of condensed water. SOLUTION: This vapor phase heater is provided with: a plurality of elongated hollow heater tracks; a vapor generator having a vapor generating chamber fluid-coupled to the inside of each track at the lower end part of each track; at least one heat input tube generating through the vapor generating chamber; a fluid which can be evaporated by heat supplied through the heat input tube; and a vapor flow connector communicating with the vapor generator and the inside of each track at a location removed from the lower end of the track to provide a conduit for vapor produced in the vapor generator to pass into each track. COPYRIGHT: (C)2003,JPO |