| 摘要 |
PROBLEM TO BE SOLVED: To provide a three dimensional shape molding method capable of reducing surface roughness that occurs on a photoresist layer. SOLUTION: This three dimensional shape molding method is provided with a folding step 3 for forming a photoresist layer 1 on a board 2, an exposing step 5 for controlling an exposure amount with respect to the photoresist layer 1 formed on the board 2 on the basis of a design value of a desired three dimensional shape with a grayscale mask 4 to expose the photoresist layer 1, a developing step 6 for developing the exposed photoresist layer 1, and a melting step 7 for melting the surface of the developed photoresist layer 1. Since the melting step 7 deforms the melted surface to be smoothy due to the viscosity of the photoresist, surface roughness that occurs on the photoresist layer 1 can be reduced without causing a large shape change in a desired three dimensional shape. COPYRIGHT: (C)2003,JPO
|
