| 摘要 |
PROBLEM TO BE SOLVED: To resolve the problem that it is difficult to improve the mirror surface precision. SOLUTION: A reflection mirror support mechanism is provided with a reflection mirror 2 having a spot facing part 2Z in the side face, a mirror holder 3 for supporting the reflection mirror 2, and a flat spring 4 for pressing the mirror holder-side surface of the spot facing part 2Z to the mirror holder. The reflection mirror 2 can be moved in the direction of a plane thereof, and the mirror holder-side surface of the spot facing part 2Z is made parallel with a rear side 2b of the reflection mirror 2. A first pad 5 is provided between the flat spring 4 and the mirror holder-side surface of the spot facing part 2Z. A second pad 6 of which the contact part to the rear side 2b of the reflection mirror 2 is plane and the contact part to the mirror holder 3 is spherical and protects the rear side of the reflection mirror is provided in the space between the rear side 2b of the reflection mirror 2 and the mirror holder. COPYRIGHT: (C)2003,JPO |
