| 摘要 |
PROBLEM TO BE SOLVED: To provide an inorganic-organic hybrid thin film, its preparation method and a member having a high lubricity on which the thin film is formed. SOLUTION: The inorganic-organic hybrid thin film having wear resistance, high lubricity, a water repellent property and an oil repellent property is prepared by using a base material composed of one or more kinds selected from a metal, a ceramic, glass and a plastic, depositing one or more kinds selected from ceramic precursors of organic silane compounds and organic metallic compounds to form a film, photo-oxidizing and/or three-dimensionally cross- linking the film to remove organic components to chemically convert to a ceramic thin film and chemically reacting the surface of the ceramic thin film with organic silane having a carbon fluoride chain and/or a long chain alkyl group. COPYRIGHT: (C)2003,JPO
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