| 摘要 |
PROBLEM TO BE SOLVED: To accurately adjust the position of an optical element such as a specified lens element constituting an illumination optical system and a projection optical system for a projection aligner without causing side effects such as the deformation and the distortion of the optical element. SOLUTION: A movable table 2 holding the optical element is supported with respect to a fixed table 1 so that it can move through the passive stages 9 of three coupling parts 3A to 3C in directions D2, D4 and D6 in a restraining force free state, that is, in a kinematic restraint state. In such a state, the stages 9 are driven in directions D1, D3 and D5 orthogonal to the directions D2, D4 and D6 by the coupling parts 3A to 3C respectively, whereby the movable stage 2 is positioned in a translating direction and a rotating direction without being deformed or distorted. COPYRIGHT: (C)2003,JPO |
