ELECTRON SOURCE DEVICE AND MANUFACTURING METHOD THEREFOR

摘要

PROBLEM TO BE SOLVED: To provide a low-cost and long-service-life electron source device having a high electron emission performance, and to provide a manufacturing method for the electron source device.

SOLUTION: In this electron source device, one face of an Al substrate is formed with a porous aluminum layer by anodization, and embedded layers of Ni or the like are formed inside nanoholes thereof. A surface of the aluminum layer is formed with a thin film of Au or the like such that the thin film contacts with the Ni embedded layers, and bottom end parts of the nanoholes and the Al substrate are separated by a barrier layer of aluminum.

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