| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a stage device and an aligner capable of suppressing deformation at assembling or deformation that accompanies the vacuum evacuation of a chamber where the stage device is disposed. <P>SOLUTION: The stage device comprises a spherical hydrostatic bearing 200 between a stage base 24A and a chamber bottom 113A. The spherical hydrostatic bearing 200 reduces a compulsory twisting force which acts on the stage base 24A or a chamber 24. Thus, the deformation at assemblying and the deformation of the stage device and a vacuum chamber of the aligner that accompanies the vacuum evacuation are suppressed. <P>COPYRIGHT: (C)2003,JPO</p> |
