| 摘要 |
PROBLEM TO BE SOLVED: To provide a circuit pattern detector and circuit pattern inspection method for accurately detecting voltage distribution of a circuit pattern formed on a circuit board optically and inspecting the short or disconnection of the circuit pattern. SOLUTION: A transparent conductive layer 12 is formed on a glass substrate 11. On the surface of an electrooptical crystal layer 15, a reflection prevention layer 14 and a reflection layer 16 are formed. On the surface (lower surface) of the transparent conductive layer 12, the reflection prevention layer 14 of the electrooptical crystal layer is bonded putting an adhesive layer 13 in between. That is, between the adhesive layer 13 and the electrooptical crystal layer 15, the reflection prevention layer 14 is provided. COPYRIGHT: (C)2003,JPO
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