CIRCULATOR, ISOLATOR, PLASMA PROCESSING APPARATUS AND PROCESSING METHOD USING THE SAME, SWITCHING MACHINE FOR MICROWAVE WAVEGUIDE AND MICROWAVE PROCESSING APPARATUS

摘要

PROBLEM TO BE SOLVED: To enable switching for changing the direction of a DC magnetic field, as required and reversing the direction of a current generated in central conductors crossing with each other.

SOLUTION: A circulator applies a DC magnetic field to a waveguide 1 being the central conductor consisting of a plurality of parts arranged so as to cross with each other on the same plane, from a direction perpendicular to the plane, including the waveguide 1. The circulator has two pairs of permanent magnets 4, 5 each provided on a magnet case 3 for performing an operation 6 for the waveguide 1 and having reverse magnetic field directions each other, as a magnetic direction reversal means for reversing the direction of the DC magnetic field to reverse the direction of a current generated in the central conductors which cross with each other.

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