| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an image quality compensating method which provides an output image closest to an input image, can improve the image quality of the output image and controls a TRC. <P>SOLUTION: This image quality compensating method includes the steps of: comparing a measurement TRC Φ<SB>0</SB>measured by using a CTD sensor with a target TRC ΦT to calculate deviation ΔΦ (a); calculating a new development bias VBN by calculating a development bias displacement magnitude ΔVB from a Jacobian matrix JB of a measurement development bias VB to set a measurement grid potential VG in a new grid potential VGN if the deviation ΔΦ is larger than an allowable deviation ΔΦT (b); calculating a back plating vector VBP from the grid potential VGN and the development bias (c); and comparing the back plating vector VBP with a critical value VT, setting control variables VGN and VBN and controlling a TRC (Φ) (d). <P>COPYRIGHT: (C)2003,JPO |
