| 摘要 |
PROBLEM TO BE SOLVED: To carry out a series of processings at least from a test process to a marking/packaging process by one processing apparatus for an processing apparatus for an integrated circuit. SOLUTION: A measurement stage S4 and a marking stage S7 are provided in conveyance units 2, 3, 4, and 5 for packaging an integrated circuit element conveyed by the conveyance units 2, 3, 4, and 5. COPYRIGHT: (C)2003,JPO
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