METHOD OF MANUFACTURING STRUCTURE SUPPORT, STRUCTURE SUPPORT, AND ELECTRON BEAM DEVICE HAVING THIS STRUCTURE SUPPORT

摘要

PROBLEM TO BE SOLVED: To provide a manufacturing method of a structure support for highly accurately and easily forming an electrode of a spacer. SOLUTION: This manufacturing method includes a first process of forming a low resistance film 1020c having a prescribed resistance value on the whole surface of a spacer base board 1020a composed of first and second surfaces having a prescribed surface different in the thickness, and a second process of removing a low resistance film 1020c formed on the first surface by shaving off the first surface (a projecting part 1020d) by the prescribed thickness by polishing (grinding) or cutting. COPYRIGHT: (C)2003,JPO