发明名称 METHOD FOR MANUFACTURING MICRODRILL USING EXPOSURE SOLUTION AND MANUFACTURING DEVICE THEREOF
摘要 PROBLEM TO BE SOLVED: To perform twist groove processing of a microdrill with high accuracy and to mass-produce the microdrill with a high yield. SOLUTION: A method for manufacturing the microdrill comprises a step for processing a prescribed member to form a drill body part of the microdrill, an exposure solution coating step for coating a prescribed area including at least the drill body part with exposure solution, a twist groove-formed area exposing step for eliminating the exposure solution of a twist groove-formed area by rotatingly moving the microdrill straightly ahead while emitting laser beams to an exposure solution-coated surface of the drill body part, a twist groove forming step for forming a twist groove by soaking at least the drill body part in etching solution and eliminating etching from a drill body member of an area where the exposure solution is eliminated, and an exposure solution cleaning step for cleaning and eliminating the exposure solution with ultrasonic cleaning. COPYRIGHT: (C)2003,JPO
申请公布号 JP2003228170(A) 申请公布日期 2003.08.15
申请号 JP20020022076 申请日期 2002.01.30
申请人 HAIN MECHATRONICS CO LTD 发明人 LEE SUNG KU
分类号 G03F7/40;B23B51/00;G03F7/20;(IPC1-7):G03F7/20 主分类号 G03F7/40
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