| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To architect CIM system which can reduce load on a host computer, and can conduct instruction of operation condition by each board and instruction of operation sequence by each board. <P>SOLUTION: A recipe, which is distributed to each board, is managed not in the host computer but in each manufacturing device. In each manufacturing device, one or a plurality of recipes, which are numbered, is stored. In this constitution, the burden of the host computer can be reduced, because it is not necessary to manage specific contents of the recipe of each board in each manufacturing device in the host computer, even if the recipe of the manufacturing device and decision of the operation sequence are managed not in carrier units but by board units. <P>COPYRIGHT: (C)2003,JPO</p> |
