| 摘要 |
PROBLEM TO BE SOLVED: To decrease damages to a substrate and damages to a substrate stage with respect to different plasma and further to enhance treatment efficiency with respect to the different plasma in remote plasma treatment in which a plasma part for exciting gas by the use of plasma is separated from a treatment part for reacting and treating by the use of gas excited by the plasma. SOLUTION: A remote plasma treatment apparatus is constituted by a plasma chamber composed of an insulating material and a substrate or a substrate stage disposed at a position away at a constant distance from this plasma chamber. The substrate stage containing a heater can be moved vertically, and the distance from the plasma is varied according to the kind of plasma. COPYRIGHT: (C)2003,JPO
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