| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing a master disk for an optical disk with which the formation of fine groove patterns and the reduction of a manufacturing cost are made possible, a stamper and a substrate for the optical disk, respectively. SOLUTION: The master disk for the optical disk is manufactured by a first process step of applying and forming a non-photosensitive water-soluble resin as a lower layer on a glass substrate, a second process step of forming an intermediate layer for absorbing UV rays not mixed with the lower layer on the lower layer, a third process step of coating and forming a photoresist layer on the intermediate layer, a fourth process step of forming a latent image by exposing the prescribed patterns by a light beam onto the photoresist layer, a fifth state of forming the patterns by developing of an alkaline developer, a sixth process step of etching the intermediate layer after the developing, a seventh process step of forming the fine patterns on the lower layer by etching the lower layer after etching the intermediate layer, and an eighth process step of forming the disk formed with the fine patterns by the intermediate layer and the lower layer in the final by removing the photoresist layer as the glass master disk. COPYRIGHT: (C)2003,JPO
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