SYSTEMS AND METHODS FOR CHARACTERIZING A POLISHING PROCESS

摘要

Systems and methods for detecting a presence of blobs on a specimen are provided. A method may include scanning measurement spots across the specimen during polishing of a specimen. The method may also include determining if the blobs are present on the specimen at the measurement spots. In addition, systems and method for characterizing polishing of a specimen are provided. The method may include combining a portion of output signals generated at measurement spots located within a zone on the specimen. The method may further include determining a characteristic of the polishing within the zone from the combined portion of the output signals. A method may also include determining a characteristic of polishing at measurement spots and determining relative locations of the measurement spots on the specimen. Such a method may also include generating a two-dimensional map of the characteristic at the relative locations of the measurement spots.