WIRELESS SUBSTRATE-LIKE SENSOR

摘要

A wireless substrate-like sensor 112,118 is provided to facilitate alignment and calibration of semiconductor processing systems. The wireless substrate-like sensor 112,118 includes an optical image acquisition system 130 that acquires one or more images of targets 116 placed within the semiconductor processing system. Analysis of images of the targets 116 obtained by the wireless substrate-like sensor 112,118 provides position and/or orientation information in at least three degrees of freedom. An additional target 114 can be affixed to a known location within the semiconductor processing system such that imaging the reference position with the wireless substrate-like sensor 112,118 allows the measurement and compensation for pick-up errors.