发明名称 |
SYSTEM AND METHOD FOR REDUCING ELECTRIC DISCHARGE BREAKDOWN IN ELECTROSTATICALLY LEVITATED MEMS DEVICES |
摘要 |
A system and method for reducing electric discharge breakdown occurrences in a micro-electromechanical system device is provided. The device comprises a core, a shell, and electrodes, which may be formed on the shell. When voltage is applied to the electrodes, each electrode applies an electrostatic force on the core. The electrodes are arranged in concentric sets, where each set may comprises two or more electrodes. Due to the concentricity of the electrodes, a minimum distance is maintained between the core and an outer electrode of an electrode set when the core nears or touches an inner electrode of the electrode set. |
申请公布号 |
WO03067618(A2) |
申请公布日期 |
2003.08.14 |
申请号 |
WO2003US00636 |
申请日期 |
2003.01.09 |
申请人 |
BALL SEMICONDUCTOR, INC.;TAKEDA, NOBUO;TODA, RISAKU |
发明人 |
TAKEDA, NOBUO;TODA, RISAKU |
分类号 |
G01P15/125;G01P15/13 |
主分类号 |
G01P15/125 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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