METHOD FOR CHARACTERISING AND SIMULATING A CHEMICAL-MECHANICAL POLISHING PROCESS,申请号KR20037008680-传众专利搜索

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发明名称	METHOD FOR CHARACTERISING AND SIMULATING A CHEMICAL-MECHANICAL POLISHING PROCESS
摘要
申请公布号	KR20030067728(A)	申请公布日期	2003.08.14
申请号	KR20037008680	申请日期	2003.06.26
申请人		发明人
分类号	H01L21/304;B24B37/04;B24B51/00	主分类号	H01L21/304
代理机构		代理人
主权项
地址

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