METHOD FOR FABRICATING SUPERCONDUCTING JOSEPHSON JUNCTION DEVICE

摘要

PURPOSE: A method for fabricating a superconducting Josephson junction device is provided to improve uniformity and repeatability by preventing the ramp-edge surface of the first electrode layer of high temperature superconductivity from being contaminated by an organic material through a chemical cleaning process. CONSTITUTION: The first electrode layer(11) with a ramp-edge and the first insulation layer(12) are sequentially formed on a substrate(10). The inclined corner of the first electrode layer is cleaned. The cleaned first electrode layer is chemically processed to form a transformation layer by using deionized water. The second electrode layer(15) and the second insulation layer(16) are sequentially formed on the first electrode layer and the first insulation layer.