发明名称 IMPROVED SEMICONDUCTOR STRESS BUFFER COATING EDGE BEAD REMOVAL COMPOSITIONS AND METHOD FOR THEIR USE
摘要 <p>An edge bead remover composition that includes at least one ketone selected from the group consisting of: (Formula 1 &amp; Formula 2); wherein R1 and R2 are independently selected from the group consisting of: methyl, ethyl, n-propyl, n-butyl, sec-butyl, and isobutyl, and wherein n equals 1 or 2; at least one ester other than lactones; and at least one lactone.</p>
申请公布号 WO2003067631(P1) 申请公布日期 2003.08.14
申请号 US2003003584 申请日期 2003.02.06
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