LOADLOCK CHAMBER FOR SEMICONDUCTOR FABRICATING EQUIPMENT WITH STRUCTURE OF FIXING WAFER CASSETTE

摘要

PURPOSE: A loadlock chamber for semiconductor fabricating equipment with a structure of fixing a wafer cassette is provided to prevent an error from occurring when the wafer cassette is transferred by preventing the wafer cassette from being bent while using an improved structure of the structure of fixing the wafer cassette. CONSTITUTION: The loadlock chamber makes the wafer cassette(41) maintain a standby state such that the wafer cassette contains a plurality of wafers. A door(30) is so installed in an opening of the loadlock chamber as to open or close the opening, capable of rotating at a predetermined angle. A plurality of wafer cassettes are settled in a wafer cassette settling unit(33), installed in the upper surface of the inside of the door. A pair of wafer cassette fixing guides(43) are installed in the wafer cassette settling unit. Both sidewalls(41a) of the bottom of the wafer cassette are lengthwise inserted into the wafer cassette fixing guide to make the wafer cassette settle in the upper surface of the door.