发明名称 Stripe waveguide structure type semiconductor laser device and fabricating method therefor
摘要 There is provided a stripe waveguide structure type semiconductor laser device capable of preventing the occurrence of unevenness on the side surface of a channel and a fabricating method therefor. An etching stop layer 1 is formed under a second upper clad layer 2. This etching stop layer 1 is constructed of a GaAs layer 1a, an Al0.5Ga0.5As layer 1b formed under this GaAs layer 1a and a GaAs layer 1c formed under this Al0.5Ga0.5As layer 1b. With this arrangement, the unevenness of the side surface of the channel formed of a GaAs layer 3 and the second upper clad layer 2 can be controlled.
申请公布号 US2003152122(A1) 申请公布日期 2003.08.14
申请号 US20030348323 申请日期 2003.01.22
申请人 SHARP KABUSHIKI KAISHA 发明人 OHBUCHI SYUZO
分类号 H01S5/223;H01S5/20;H01S5/227;H01S5/32;(IPC1-7):H01S5/00 主分类号 H01S5/223
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