发明名称 PROBE NEEDLE FOR TESTING SEMICONDUCTOR CHIPS AND METHOD FOR PRODUCING SAID PROBE NEEDLE
摘要 The invention relates to a probe needle for testing semiconductor chips, one end of said probe needle being fixed in a holding element and the free end thereof comprising a contact tip. The invention also relates to a method for producing a probe needle for testing semiconductor chips, said method comprising a plurality of treatment steps for forming the probe needle. The aim of the invention is to increase the service life of probe needles. To this end, the probe needle is provided - at least on the surface of the contact tip - with a layer consisting of a chemically inert, electroconductive material which is hard in relation to the material of contact surfaces of the semiconductor chips.
申请公布号 WO03035541(A3) 申请公布日期 2003.08.14
申请号 WO2002DE03830 申请日期 2002.10.11
申请人 INFINEON TECHNOLOGIES AG;SCHNEEGANS, MANFRED;PIETSCHMANN, FRANK 发明人 SCHNEEGANS, MANFRED;PIETSCHMANN, FRANK
分类号 G01R31/26;G01R1/067;G01R3/00;H01L21/66 主分类号 G01R31/26
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