| 摘要 |
PURPOSE: A micro mirror is provided to enhance a degree of integration of the micro mirror by aligning two substrates to obtain a sufficient interval between the mirror and a lower electrode. CONSTITUTION: A micro mirror includes the first substrate(1), a plurality of electrodes(2,3,4,5), the second substrate(6), and a mirror(7). The first substrate has a mesa structure. The electrodes are formed on a center region of the first substrate. The second substrate is formed on an upper portion of the first substrate. A cavity is formed on a center portion of the second substrate. The mirror is installed on the cavity of the second substrate. The mirror is rotated to the predetermined direction by the voltages applied from the electrodes.
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