METHOD FOR MANUFACTURING A PROGRAMMABLE CHALCOGENIDE FUSE WITHIN A SEMICONDUCTOR DEVICE
摘要
A method for manufacturing a programmable chalcogenide fuse within a semiconductor device is disclosed. A resistor (18) is initially formed on a substrate. Then, a chalcogenide fuse (21) is formed on top of the resistor. Finally, a conductive layer is deposited on top of the chalcogenide fuse for providing electrical conduction to the chalcogenide fuse.
申请公布号
WO03021675(A3)
申请公布日期
2003.08.14
申请号
WO2002US26774
申请日期
2002.08.23
申请人
BAE SYSTEMS INFORMATION AND ELECTRONICS SYSTEMS INTEGRATION INC.