发明名称 |
DEVICE AND METHOD FOR OPTICALLY SCANNING A SUBSTRATE DISK |
摘要 |
The invention relates to an optical scanning system (1) for a substrate disk, comprising an image recording device (4) and an exposure device. The image recording device scans an object line (8) in an area of recording (2) on the substrate disk. The exposure device comprises a light source (10) and an optical system (3), whereby said optical system (3) is adapted to direct the light emitted by the light source (10) as a linear exposure area onto the position of the object line (8) and evenly distributed across the entire length of the object line (8) to be recorded. |
申请公布号 |
WO03027630(A3) |
申请公布日期 |
2003.08.14 |
申请号 |
WO2002DE03531 |
申请日期 |
2002.09.20 |
申请人 |
SIEMENS AKTIENGESELLSCHAFT;GERHARD, DETLEF;LECHNER, JOHANNES;RIEGER, DETLEF |
发明人 |
GERHARD, DETLEF;LECHNER, JOHANNES;RIEGER, DETLEF |
分类号 |
G01N21/95;G02B26/10;G03F7/20 |
主分类号 |
G01N21/95 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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