| 摘要 |
<p>A microelectromechanical (MEMS) device (100) having a system for sensing the position of the moving element (106) of the MEMS (100) device. The present invention digitally senses the movement and/or the position of the moving element (106) by generating digital signals in a way that the signal has a certain value, true value, when the moving element (106) is in an area associated with one of the sections of the conductive lines (120, 130, 320, 330), and another value, false signal, when the moving element (106) is not in an area of one of the sections, false signal.</p> |
