TWIST SPRING FOR MEMS STRUCTURE

摘要

PURPOSE: A twist spring used for a MEMS structure is provided to achieve a twist spring having higher bending strength as compared with twist strength thereof and to simplify manufacturing process of the twist spring. CONSTITUTION: A twist spring(30) includes a pair of beams(31) and four connecting bars(33) for connecting the beams(31) to each other. The beams(31) are aligned in an X-axis direction with respect to a twist deformation. Each beam(31) has a rectangular plate shape. The beams(31) are parallel aligned to each other. Both ends of each beam(31) are fixed to a predetermined portion of a substrate. The connecting bars(33) are vertically disposed with respect to a length direction of the beams(31). The connecting bars(33) are aligned while forming a regular interval. The twist spring(30) has three holes(40).