| 摘要 |
<p>An optical waveguide manufacturing method in which a mask is provided on the surface of a core layer and a dry-etching is carried out is characterized in that at the dry-etching step, an etching and an ashing are carried out. The uneven surface formed around the periphery of a core pattern during the optical waveguide manufacturing is prevented from being formed, thus providing an optical waveguide having a small optical transmission loss.</p> |
