发明名称 Droplet ejection apparatus, a pattern formation apparatus, a wiring formation apparatus, a pattern formation medium, a droplet ejection method, a patterning method and a wiring formation method
摘要 After a dispersion medium with a dispersed dispersoid or a solvent medium with a dissolved solute is ejected onto a substrate, the dispersoid or the solute is aggregated on both sides of the dispersion medium or the solvent medium by convecting the dispersoid or the solute within the dispersion medium or the solvent medium.
申请公布号 US2003151650(A1) 申请公布日期 2003.08.14
申请号 US20020310121 申请日期 2002.12.04
申请人 MASUDA TAKASHI;MORII KATSUYUKI 发明人 MASUDA TAKASHI;MORII KATSUYUKI
分类号 H01L21/288;B41J2/21;B41J3/407;H01L21/28;H05K3/12;(IPC1-7):B41J2/17 主分类号 H01L21/288
代理机构 代理人
主权项
地址