发明名称 Manufacturing process for insulated gate field effect transistors (igfet) with low short circuit density between gate and source and devices obtained thereby
摘要
申请公布号 EP0545484(B1) 申请公布日期 2003.08.13
申请号 EP19920203670 申请日期 1992.11.27
申请人 CONSORZIO PER LA RICERCA SULLA MICROELETTRONICA NEL MEZZOGIORNO - CORIMME 发明人 ZAMBRANO, RAFFAELE
分类号 H01L21/336;H01L29/423;H01L29/78;(IPC1-7):H01L21/336;H01L29/772 主分类号 H01L21/336
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