| 发明名称 |
METHOD AND DEVICE FOR CHANGING A SEMICONDUCTOR WAFER POSITION |
| 摘要 |
<p>A semiconductor wafer with a positioning mark is placed in the support, which can hold a number of wafers simultaneously. Arms (5) grasp the wafer, where positioning of the wafer is effected by motor-driven (20) motions of the arm in three directions (X,Y,Z) to enable the wafer mark to be placed in a prescribed position.</p> |
| 申请公布号 |
EP1078391(B1) |
申请公布日期 |
2003.08.13 |
| 申请号 |
EP19990916975 |
申请日期 |
1999.05.03 |
| 申请人 |
RECIF S.A. |
发明人 |
ASTEGNO, PIERRE;ESTEVE, EKATERINA;GAUDON, ALAIN |
| 分类号 |
B65G49/07;H01L21/68;H01L21/687;(IPC1-7):H01L21/00 |
主分类号 |
B65G49/07 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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