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发明名称
IN-SITU MIRROR CHARACTERIZATION
摘要
申请公布号
EP1285221(A4)
申请公布日期
2003.08.13
申请号
EP20010933198
申请日期
2001.05.09
申请人
ZYGO CORPORATION
发明人
HILL, HENRY, ALLEN
分类号
G01B9/02;G01B11/00;G01B11/24;G01B11/26;G01B11/30;G03F7/20;G03F9/00;H01L21/027;(IPC1-7):G01B9/02
主分类号
G01B9/02
代理机构
代理人
主权项
地址
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