发明名称 Apparatus and method for electrical insulation in plasma discharge systems
摘要 An apparatus and method to contain plasma at optimal fill capacity of a metallic container is disclosed. The invention includes the utilization of anodized layers forming the internal surfaces of the container volume. Bias resistors are calibrated to provide constant current at variable voltage conditions. By choosing the appropriate values of the bias resistors, the voltages of the metallic container relative to the voltage of an anode are adjusted to achieve optimal plasma fill while minimizing the chance of reaching the breakdown voltage of the anodized layer.
申请公布号 US6605901(B1) 申请公布日期 2003.08.12
申请号 US20020038386 申请日期 2002.01.03
申请人 THE UNITED STATES OF AMERICA AS REPRESENTED BY THE DEPARTMENT OF ENERGY 发明人 RHODES MARK A.;FOCHS SCOTT N.
分类号 H01J37/32;(IPC1-7):H01J7/24 主分类号 H01J37/32
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