发明名称 RF circuit chip and RF circuit device including the RF circuit chip
摘要 To eliminate variations in measurement of the chip characteristics an MMIC chip has a pad main portion having the same width as a main line at an end of the main line The main line is located on a GaAs substrate. Pad auxiliary islands are adjacent to the pad main portion on one or both sides. A grounding wiring layer is on at least one side of the pad main portion with the pad auxiliary island interposed in between. The pad main portion and the pad auxiliary portions secure a sufficient bonding area. The electrical characteristics are measured by bringing probes into contact with the pad main portion and the grounding wiring layer(s). The electrical characteristics of the MMIC chip can be evaluated without an increase in bonding pad capacitance.
申请公布号 US6605871(B2) 申请公布日期 2003.08.12
申请号 US20010960493 申请日期 2001.09.24
申请人 MITSUBISHI DENKI KABUSHIKI KAISHA 发明人 CHAKI SHIN
分类号 H01L23/12;H01L21/82;H01L21/822;H01L23/34;H01L23/48;H01L23/522;H01L23/66;H01L27/04;H01L27/06;H01L29/40;H01P1/04;(IPC1-7):H01L23/48;B32B31/00 主分类号 H01L23/12
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