| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a structure used for a vacuum adsorption means for a plate material such as a disc substrate in which an adsorption V-ring contacted to the substrate can be easily replaced, and which achieves excellent vacuum leak resistance. <P>SOLUTION: A step 21 is formed at the outer circumference of a root of the adsorption V-ring shaped like a horn, and comprising an elastic material. In a hand side base member 1 to which the adsorption V-ring 2 is installed, an adsorption V-ring installing recess 12 is formed, with an adsorption V-ring tip protruding hole 14 provided in the bottom of the recess. The adsorption ring 2 is inserted to it in such a way that the step 21 on the adsorption V-ring is contacted to seal the bottom of the adsorption V-ring installing recess 12. A detachable lid body 5 is put through a presser bracket 3 to the back surface of it, and the adsorption V-ring installing recess 12 is communicated with an air suction means. <P>COPYRIGHT: (C)2003,JPO</p> |
