发明名称 Wafer level packaging for making flip-chips
摘要 A wafer level packaging process for making flip-chips and integrated circuits formed are proposed. The process comprises in turn, providing a wafer, forming a protective material, bumping the wafer, removing the protective material, probing the wafer, laser repairing, and dicing the wafer. The laser repairing step is after bumping step. The protective material such as photoresist or metal layer is filled into the depression portions above the fuses for temporary protection of the fuses during bumping.
申请公布号 US6605480(B2) 申请公布日期 2003.08.12
申请号 US20010994700 申请日期 2001.11.28
申请人 CHIPMOS TECHNOLOGIES INC. 发明人 LIU AN-HONG;TSENG YUAN-PING;LEE Y. J.
分类号 H01L21/60;H01L21/66;H01L23/525;(IPC1-7):H01L21/66 主分类号 H01L21/60
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