,申请号JP20010562222-传众专利搜索

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发明名称
摘要
申请公布号	JP2003524190(A)	申请公布日期	2003.08.12
申请号	JP20010562222	申请日期	2001.02.09
申请人		发明人
分类号	G01R31/28;G01R31/316;H01L21/822;H01L27/04;(IPC1-7):G01R31/28	主分类号	G01R31/28
代理机构		代理人
主权项
地址

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