发明名称 LIQUID APPLICATION APPARATUS
摘要 <P>PROBLEM TO BE SOLVED: To provide a liquid application apparatus by which the uniformity of the film thickness of a coating film is enhanced by providing the apparatus with a means for heating or cooling a coating head in order to keep the temperature of a coating liquid constant. <P>SOLUTION: In the liquid application apparatus constituted so that the coating film is formed on an object to be coated by moving the coating head 20 relatively in the horizontal direction to the object to be coated in the lower side while discharging the coating liquid from the opening of a slot 27, temperature control means 28a and 28b for heating or cooling the coating head to keep a prescribed temperature are attached respectively to a 1st divided head 21 and a 2nd divided head 22 freely detachably. The coating head 20 is provided with a temperature detecting means 33 for detecting the temperature of the coating head and also a control means 34 for controlling the temperature control means 28a and 28b so that the temperature of the coating head 20 becomes the prescribed temperature. <P>COPYRIGHT: (C)2003,JPO
申请公布号 JP2003225603(A) 申请公布日期 2003.08.12
申请号 JP20020028124 申请日期 2002.02.05
申请人 HIRATA CORP 发明人 NAGATA YOSHITOSHI
分类号 G03F7/16;B05C5/02;B05C11/00;H01L21/027 主分类号 G03F7/16
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