| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of manufacturing an inkjet recording head which can form pressure generation chambers well and can improve the manufacturing efficiency. SOLUTION: The method has a process of forming a diaphragm 50 and piezoelectric elements 300 on a silicon wafer 100, a process of joining a sealing substrate formation material 120 to be a sealing substrate 30 with piezoelectric element hold parts 31 for sealing piezoelectric elements 300 onto the silicon wafer 100, a process of joining a face at a recess part 133 side of a protecting member 130 having the recess part 133 sealed by a flexible film 140 having at least a part of a bottom face formed of a flexible material to the sealing substrate formation material 120, a process of forming pressure generation chambers 12 by etching the silicon wafer 100, a process of removing the protecting member 130 and a process of dividing the silicon wafer 100 and the sealing substrate formation material 120 to a predetermined size. COPYRIGHT: (C)2003,JPO
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