发明名称 Method of manufacturing a semiconductor device having a protruding bump electrode
摘要 A present semiconductor device includes a plurality of bump electrodes formed over a semiconductor substrate to allow signals to be input and output to and from a semiconductor element. After the formation of the bump electrodes an organic insulting film is coated on the whole surface of a resultant wafer structure, followed by a drying, a solidifying and an etch-back step. By so doing, a top area of the bump electrode is more projected than a top area of the organic insulating film. A lead is connected by a pressure and heat to the top area of the bump electrode.
申请公布号 US6605522(B1) 申请公布日期 2003.08.12
申请号 US20000627431 申请日期 2000.07.27
申请人 KABUSHIKI KAISHA TOSHIBA 发明人 EZAWA HIROKAZU;MIYATA MASAHIRO
分类号 H01L21/56;H01L21/321;H01L21/60;H01L23/31;H01L23/485;(IPC1-7):H01L21/44 主分类号 H01L21/56
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