Quasi-hemispherical fabry-perot resonator and method of operating the same

摘要

In a quasi-hemispherical Fabry-Perot resonator for the non-destructive determination of the surface resistance Rs of electrically conductive thin material films, spherical and planar mirrors are disposed opposite each other in a double shielded cooled resonator space structure supported on individual base plates and the planar mirror, on which a wafer with the thin material film is supported, is mounted on a support arm which extends through the double shield structure. Shield sections through which the support arm extends are supported on pivot arms which are pivotally mounted in the center of the base plates and the shield sections are engaged by the support arm so that they move along with the support arm when the support arm is moved sidewardly for a positioning change of the planar mirror thereby preventing radiation leakage from the resonator space.