FUNCTIONAL THIN FILM FORMING APPARATUS AND FUNCTIONAL THIN FILM FORMING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a functional thin film forming apparatus capable of forming a functional thin film to the surface of a substrate in uniform thickness. SOLUTION: The functional thin film forming apparatus is equipped with a coating device 1 for injecting a solution for forming the functional thin film from a nozzle by an ink jet system to apply the same to the surface of the substrate W, a baking device 2 for baking the solution applied to the surface of the substrate W by the coating device 1 and a scalar robot 3 for delivering the substrate W to the baking device from the coating device after the solution applied to the surface of the substrate W by the coating device is fluidized to become almost flat. COPYRIGHT: (C)2003,JPO